Field emission characteristics of transition-metal nitrides

Journal Article · Wed May 01 00:00:00 EDT 1996 · Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena

DOI:https://doi.org/10.1116/1.588882· OSTI ID:288177

Endo, M; Nakane, H; Adachi, H ^[1]

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1. Department of Electrical and Electronic Engineering, Muroran Institute of Technology, 27-1 Mizumoto-cho Muroran, Hokkaido 050 (Japan)

Transition-metal nitrides seem to have good field emission characteristics, but their field emission properties are not well known. NbN, Nb{sub 2}N, TiN, and ZrN emitters were fabricated by nitriding elemental metal needles. These nitride field emitters gave step- and spikelike current fluctuations. The NbN emitters, which had been flash heated at 900{degree}C, showed the most stable field emission current among the nitride emitters examined. {copyright} {ital 1996 American Vacuum Society}

• OSTI ID: 288177
• Report Number(s): CONF-9507110-; ISSN 0734-211X; TRN: 9612M0069
• Journal Information: Journal of Vacuum Science and Technology. B, Microelectronics Processing and Phenomena, Vol. 14, Issue 3; Conference: 8. international vacuum microelectronics conference, Portland, OR (United States), 30 Jul - 3 Aug 1995; Other Information: PBD: May 1996
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
NIOBIUM NITRIDES
FIELD EMISSION
TITANIUM NITRIDES
ZIRCONIUM NITRIDES
NITRIDATION
TEMPERATURE RANGE 1000-4000 K