Silicon-containing diamond like-carbon coatings formed by ion beam assisted deposition (IBAD): Processing and properties of a new category of hard, wear resistant thin films

Conference · Sun Dec 31 00:00:00 EST 1995

OSTI ID:230180

Fountzoulas, C G; Demaree, J D; Hirvonen, J K ^[1]

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1. Univ. of Connecticut, Storrs, CT (United States); and others

Amorphous silicon-containing diamond like-carbon Si-DLQ coatings were formed by thermal evaporation of a tetraphenyl-tetramethyl-trisiloxane ((C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2}) diffusion pump oil (Dow Corning 704) onto silicon and steel substrates with simultaneous bombardment of the growing film with 40 keV Ar{sup +} ions to decompose the (C{sub 6}H{sub 5}){sub 4}(CH{sub 3}){sub 4}Si{sub 3}O{sub 2} molecules. Both the current density of the ion beam and the oil arrival rate were varied to produce hard, adhesive films on room temperature substrates, with densities ranging from 1.4 to 2.3 g/cm{sup 3} and Knoop microhardness values (at 15 g load) from 1000 to 2100 MPa.

• OSTI ID: 230180
• Report Number(s): CONF-950840-; TRN: 96:000433-0183
• Resource Relation: Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
SILICON
WEAR RESISTANCE
SURFACE COATING
DIAMONDS
STEELS
ADHESION
EVAPORATION
FRICTION
MICROHARDNESS
PROCESSING
THIN FILMS
ENERGY BEAM DEPOSITION FILMS