Controlling properties of DLC: Effects of pressure and precursor dilution
- T.J. Watson Research Center, Yorktown Heights, NY (United States)
Diamond-like carbon (DLC) films have been deposited by plasma assisted chemical vapor deposition using a RF excited plasma of cyclohexane. The films have been deposited at different pressures and constant RF power density. For specific combinations of plasma parameters the precursor has been diluted with argon. It has been found that the physical properties and the wear resistance of the DLC films are strongly dependent on the pressure in the reactor and corresponding substrate bias. Films deposited at a pressure above a threshold value had polymer-like characteristics. It was further found that it is possible to enhance diamond-like properties of films deposited above the threshold pressure by diluting the precursor with argon.
- OSTI ID:
- 230142
- Report Number(s):
- CONF-950840-; TRN: 96:000433-0142
- Resource Relation:
- Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
- Country of Publication:
- United States
- Language:
- English
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