Anodic bonding of diamond to glass
Conference
·
OSTI ID:230120
- Materials and Technologies Corp., Poughkeepsie, NY (United States)
- Geo-Centers, Inc., Fort Washington, MD (United States)
- Naval Research Lab., Washington, DC (United States)
A method is described for anodically bonding smooth nanocrystalline diamond films to glass substrates to form extremely flat diamond membranes with the smoothest side available of patterning absorber structures to form masks for proximity focused x-ray lithography.
- OSTI ID:
- 230120
- Report Number(s):
- CONF-950840-; TRN: 96:000433-0120
- Resource Relation:
- Conference: International conference on applications of diamond films and related materials, Gaithersburg, MD (United States), 21-24 Aug 1995; Other Information: PBD: 1995; Related Information: Is Part Of Applications of diamond films and related materials: Third international conference; Feldman, A.; Yarbrough, W.A.; Murakawa, Masao; Tzeng, Yonhua; Yoshikawa, Masanori [eds.]; PB: 973 p.
- Country of Publication:
- United States
- Language:
- English
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