Laboratory-size three-dimensional water-window x-ray microscope with Wolter type I mirror optics

Journal Article · Thu Jan 28 00:00:00 EST 2016 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4937503· OSTI ID:22494379

Ohsuka, Shinji ^[1]; Ohba, Akira; Onoda, Shinobu; Nakamoto, Katsuhiro ^[1]; Nakano, Tomoyasu ^[1]; Miyoshi, Motosuke; Soda, Keita; Hamakubo, Takao ^[2]

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1. Hamamatsu Photonics K.K., 5000 Hirakuchi, Hamakita-ku, Hamamatsu-City, 434-8601 (Japan)
2. Research Center for Advanced Science and Technology, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8904 (Japan)

We constructed a laboratory-size three-dimensional water-window x-ray microscope that combines wide-field transmission x-ray microscopy with tomographic reconstruction techniques. It consists of an electron-impact x-ray source emitting oxygen Kα x-rays, Wolter type I grazing incidence mirror optics, and a back-illuminated CCD for x-ray imaging. A spatial resolution limit better than 1.0 line pairs per micrometer was obtained for two-dimensional transmission images, and 1-μm-scale three-dimensional fine structures were resolved.

• OSTI ID: 22494379
• Journal Information: AIP Conference Proceedings, Vol. 1696, Issue 1; Conference: XRM 2014: 12. international conference on X-ray microscopy, Melbourne (Australia), 26-31 Oct 2014; Other Information: (c) 2016 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ELECTRONS
FINE STRUCTURE
GRAZING
IMAGES
MICROSCOPES
MICROSCOPY
MIRRORS
OPTICS
OXYGEN
SPATIAL RESOLUTION
TOMOGRAPHY
TWO-DIMENSIONAL CALCULATIONS
WATER
WINDOWS
X RADIATION
X-RAY SOURCES