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Title: Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond

Abstract

Precision admittance spectroscopy measurements over wide temperature and frequency ranges were carried out for chemical vapor deposition epitaxial diamond samples doped with various concentrations of boron. It was found that the experimentally detected boron activation energy in the samples decreased from 314 meV down to 101 meV with an increase of B/C ratio from 600 to 18000 ppm in the gas reactants. For the heavily doped samples, a transition from thermally activated valence band conduction to hopping within the impurity band (with apparent activation energy 20 meV) was detected at temperatures 120–150 K. Numerical simulation was used to estimate the impurity DOS broadening. Accurate determination of continuously altering activation energy, which takes place during the transformation of conduction mechanisms, was proposed by numerical differentiation of the Arrhenius plot. With increase of boron doping level the gradual decreasing of capture cross section from 3 × 10{sup −13} down to 2 × 10{sup −17} cm{sup 2} was noticed. Moreover, for the hopping conduction the capture cross section becomes 4 orders of magnitude less (∼2 × 10{sup −20} cm{sup 2}). At T > T{sub room} in doped samples the birth of the second conductance peak was observed. We attribute it to a defect, related to the boron doping of the material.

Authors:
; ; ;  [1]; ;  [2];  [1]
  1. St. Petersburg State Electrotechnical University (LETI), Professor Popov Street 5, 197376 St. Petersburg (Russian Federation)
  2. Institute of Applied Physics of the Russian Academy of Sciences, Ul'yanov Street 46, 603950 Nizhny Novgorod (Russian Federation)
Publication Date:
OSTI Identifier:
22492813
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 118; Journal Issue: 14; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ACCURACY; ACTIVATION ENERGY; BORON; CHEMICAL VAPOR DEPOSITION; COMPUTERIZED SIMULATION; DIAMONDS; DOPED MATERIALS; ELECTRONIC STRUCTURE; FREQUENCY RANGE; IMPURITIES; SPECTROSCOPY

Citation Formats

Zubkov, V. I., E-mail: VZubkovspb@mail.ru, Kucherova, O. V., Zubkova, A. V., Ilyin, V. A., Afanas'ev, A. V., Bogdanov, S. A., Vikharev, A. L., Butler, J. E., Institute of Applied Physics of the Russian Academy of Sciences, Ul'yanov Street 46, 603950 Nizhny Novgorod, and National Museum of Natural History. Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond. United States: N. p., 2015. Web. doi:10.1063/1.4932664.
Zubkov, V. I., E-mail: VZubkovspb@mail.ru, Kucherova, O. V., Zubkova, A. V., Ilyin, V. A., Afanas'ev, A. V., Bogdanov, S. A., Vikharev, A. L., Butler, J. E., Institute of Applied Physics of the Russian Academy of Sciences, Ul'yanov Street 46, 603950 Nizhny Novgorod, & National Museum of Natural History. Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond. United States. https://doi.org/10.1063/1.4932664
Zubkov, V. I., E-mail: VZubkovspb@mail.ru, Kucherova, O. V., Zubkova, A. V., Ilyin, V. A., Afanas'ev, A. V., Bogdanov, S. A., Vikharev, A. L., Butler, J. E., Institute of Applied Physics of the Russian Academy of Sciences, Ul'yanov Street 46, 603950 Nizhny Novgorod, and National Museum of Natural History. 2015. "Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond". United States. https://doi.org/10.1063/1.4932664.
@article{osti_22492813,
title = {Temperature admittance spectroscopy of boron doped chemical vapor deposition diamond},
author = {Zubkov, V. I., E-mail: VZubkovspb@mail.ru and Kucherova, O. V. and Zubkova, A. V. and Ilyin, V. A. and Afanas'ev, A. V. and Bogdanov, S. A. and Vikharev, A. L. and Butler, J. E. and Institute of Applied Physics of the Russian Academy of Sciences, Ul'yanov Street 46, 603950 Nizhny Novgorod and National Museum of Natural History},
abstractNote = {Precision admittance spectroscopy measurements over wide temperature and frequency ranges were carried out for chemical vapor deposition epitaxial diamond samples doped with various concentrations of boron. It was found that the experimentally detected boron activation energy in the samples decreased from 314 meV down to 101 meV with an increase of B/C ratio from 600 to 18000 ppm in the gas reactants. For the heavily doped samples, a transition from thermally activated valence band conduction to hopping within the impurity band (with apparent activation energy 20 meV) was detected at temperatures 120–150 K. Numerical simulation was used to estimate the impurity DOS broadening. Accurate determination of continuously altering activation energy, which takes place during the transformation of conduction mechanisms, was proposed by numerical differentiation of the Arrhenius plot. With increase of boron doping level the gradual decreasing of capture cross section from 3 × 10{sup −13} down to 2 × 10{sup −17} cm{sup 2} was noticed. Moreover, for the hopping conduction the capture cross section becomes 4 orders of magnitude less (∼2 × 10{sup −20} cm{sup 2}). At T > T{sub room} in doped samples the birth of the second conductance peak was observed. We attribute it to a defect, related to the boron doping of the material.},
doi = {10.1063/1.4932664},
url = {https://www.osti.gov/biblio/22492813}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 14,
volume = 118,
place = {United States},
year = {Wed Oct 14 00:00:00 EDT 2015},
month = {Wed Oct 14 00:00:00 EDT 2015}
}