The application of multilayer elastic beam in MEMS safe and arming system
- National Lab of Mechatronic Engineering and Control, Beijing Institute of Technology, Beijing 100081, P.R.CHINA (China)
- Institute of High Energy Physics Chinese Academy of Sciences, Beijing 100049, P.R.CHINA (China)
In this paper, a new approach for a multilayer elastic beam to provide a driving force and driving distance for a MEMS safe and arming system is presented. In particular this is applied where a monolayer elastic beam cannot provide adequate driving force and driving distance at the same time in limited space. Compared with thicker elastic beams, the bilayer elastic beam can provide twice the driving force of a monolayer beam to guarantee the MEMS safe and arming systems work reliably without decreasing the driving distance. In this paper, the theoretical analysis, numerical simulation and experimental verification of the multilayer elastic beam is presented. The numerical simulation and experimental results show that the bilayer elastic provides 1.8–2 times the driving force of a monolayer, and a method that improves driving force without reducing the driving distance.
- OSTI ID:
- 22492260
- Journal Information:
- AIP Advances, Vol. 5, Issue 7; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
- Country of Publication:
- United States
- Language:
- English
Similar Records
Microelectromechanical safe arm device
Strain, interdiffusion, and microstructural evolution under ion irradiation in Ni(111)/Mo(110) multilayers: Interdependence with elastic properties