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Title: Atomic-scale microstructure underneath nanoindentation in Al-Cr-N ceramic films

Journal Article · · AIP Advances
DOI:https://doi.org/10.1063/1.4939138· OSTI ID:22492251
;  [1];  [2]
  1. Beijing Key Lab of Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing 100124 (China)
  2. School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640 (China)

In this work, Al-Cr-N ceramic films deformed by nanoindentation were peeled off from silicon substrates and their atomic-scale microstructures underneath the indenter were investigated by high resolution transmission electron microscope (HR-TEM). Dislocations were formed underneath the indenter and they accumulated along nano-grain boundaries. The accumulative dislocations triggered the crack initiation along grain boundaries, and further resulted in the crack propagation. Dislocations were also observed in nano-grains on the lateral contact area. A model was proposed to describe the variation of microstructures under nanoindentation.

OSTI ID:
22492251
Journal Information:
AIP Advances, Vol. 5, Issue 12; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
Country of Publication:
United States
Language:
English