Atomic-scale microstructure underneath nanoindentation in Al-Cr-N ceramic films
- Beijing Key Lab of Microstructure and Properties of Advanced Materials, Beijing University of Technology, Beijing 100124 (China)
- School of Materials Science and Engineering, South China University of Technology, Guangzhou 510640 (China)
In this work, Al-Cr-N ceramic films deformed by nanoindentation were peeled off from silicon substrates and their atomic-scale microstructures underneath the indenter were investigated by high resolution transmission electron microscope (HR-TEM). Dislocations were formed underneath the indenter and they accumulated along nano-grain boundaries. The accumulative dislocations triggered the crack initiation along grain boundaries, and further resulted in the crack propagation. Dislocations were also observed in nano-grains on the lateral contact area. A model was proposed to describe the variation of microstructures under nanoindentation.
- OSTI ID:
- 22492251
- Journal Information:
- AIP Advances, Vol. 5, Issue 12; Other Information: (c) 2015 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2158-3226
- Country of Publication:
- United States
- Language:
- English
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