A new apparatus for electron tomography in the scanning electron microscope

Journal Article · Tue Jun 23 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4922569· OSTI ID:22490685

Maccagnani, P.; Masini, L.; Migliori, A.; Ortolani, L.; Pezza, A. ^[1]; Del Marro, M.; Pallocca, G.; Vinciguerra, P. ^[2]; Rossi, M.; Ferroni, M. ^[3]; Sberveglieri, G. ^[4]; Vittori-Antisari, M. ^[5]

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1. CNR-IMM Sezione di Bologna, via Gobetti 101, 40129 Bologna (Italy)
2. ASSING S.P.A., via E. Amaldi 14, 00016 Monterotondo (Rome) (Italy)
3. Dip.to di Scienze di Base e Applicate per l’Ingegneria and Centro di Ricerca per le Nanotecnologie Applicate all’Ingegneria (CNIS), Università degli Studi di Roma “Sapienza”, Via A. Scarpa, 00161 Rome (Italy)
4. SENSOR Lab, Dip.to di Ingegneria dell’Informazione, Università degli Studi di Brescia and CNR-INO, Via Valotti 9, 25123 Brescia (Italy)
5. Unità Tecnica Tecnologie dei Materiali, ENEA Centro Ricerche Casaccia, Via Anguillarese 301, 00123 S. Maria di Galeria (Rome) (Italy)

The three-dimensional reconstruction of a microscopic specimen has been obtained by applying the tomographic algorithm to a set of images acquired in a Scanning Electron Microscope. This result was achieved starting from a series of projections obtained by stepwise rotating the sample under the beam raster. The Scanning Electron Microscope was operated in the scanning-transmission imaging mode, where the intensity of the transmitted electron beam is a monotonic function of the local mass-density and thickness of the specimen. The detection strategy has been implemented and tailored in order to maintain the projection requirement over the large tilt range, as required by the tomographic workflow. A Si-based electron detector and an eucentric-rotation specimen holder have been specifically developed for the purpose.

• OSTI ID: 22490685
• Journal Information: AIP Conference Proceedings, Vol. 1667, Issue 1; Conference: Nanoforum 2014, Rome (Italy), 22-25 Sep 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ALGORITHMS
BIOMEDICAL RADIOGRAPHY
DENSITY
DETECTION
ELECTRON BEAMS
ELECTRON DETECTION
ELECTRONS
EQUIPMENT
IMAGES
ROTATION
SAMPLE HOLDERS
SCANNING ELECTRON MICROSCOPY
SILICON
THREE-DIMENSIONAL LATTICES
TOMOGRAPHY
TRANSMISSION