Elastic-properties measurement at high temperatures through contact resonance atomic force microscopy

Journal Article · Tue Jun 23 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4922565· OSTI ID:22490682

Marinello, Francesco; Pezzuolo, Andrea; Sartori, Luigi; Cavalli, Raffaele ^[1]; Carmignato, Simone ^[2]; Savio, Enrico ^[3]; De Chiffre, Leonardo ^[4]

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1. University of Padova, Department of Land, Environment, Agriculture and Forestry, Viale dell’Università 16, 35020 Legnaro, Padova (Italy)
2. University of Padova, Department of Management and Engineering, Stradella San Nicola 3, 36100 Vicenza (Italy)
3. University of Padova, Department of Industrial Engineering, Via Venezia 1, 35131 Padova (Italy)
4. Technical University of Denmark, Department of Mechanical Engineering, Produktionstorvet 425, 2800 Kgs. Lyngby (Denmark)

Miniaturization of products and need for further improvement of machines performance introduce new serious challenges in materials characterization. In particular non-destructive mechanical testing in the sub-micrometer scale is needed to better understand and improve micro-manufacturing operations. To this regard, some open issues are of particular interest: low depth of penetration, high lateral resolution and measurements at elevated temperatures. An interesting solution is given by acoustic microscopy techniques, which can be successfully implemented for advanced research in surface elasticity, allowing fast direct and non-destructive measurement of Young’s modulus and related surface parameters. In this work an instrument set up for Contact Resonance Atomic Force Microscopy is proposed, where the sample with is coupled to a heating stage and a piezoelectric transducer directly vibrate the cantilever during scanning, in order to allow exploitation of high resolution measurements at relatively high temperatures. Such instrument set up was undergone a set of calibration experiments in order to allow not only qualitative but also quantitative characterization of surfaces. The work was completed with a feasibility study with mechanical and topography measurements at temperatures as high as 150°C, with lateral resolution lower than 100 nm.

• OSTI ID: 22490682
• Journal Information: AIP Conference Proceedings, Vol. 1667, Issue 1; Conference: Nanoforum 2014, Rome (Italy), 22-25 Sep 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ACOUSTIC MICROSCOPY
ATOMIC FORCE MICROSCOPY
CALIBRATION
ELASTICITY
FEASIBILITY STUDIES
HEATING
MINIATURIZATION
NONDESTRUCTIVE TESTING
PENETRATION DEPTH
PERFORMANCE
PIEZOELECTRICITY
RESOLUTION
RESONANCE
RESOURCE EXPLOITATION
SURFACES
TRANSDUCERS
YOUNG MODULUS