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Title: Confocal Raman studies in determining crystalline nature of PECVD grown Si nanowires

Silicon nanowires of diameter ∼200 nm and length of 2-4 µm are grown in the plasma enhanced chemical vapour deposition technique using nanoclustered Au catalyst assisted vapour-liquid-solid process. The crystallinity in the as-grown and annealed samples is studied using confocal Raman spectroscopic studies. Amorphous phase is formed in the as-grown samples. Structural studies using high resolution transmission electron microscopy confirm the polycrystalline nature in the annealed sample.
Authors:
; ;  [1] ;  [2] ; ; ;  [3] ; ;  [4] ;  [1]
  1. SSN Research Centre, Kalavakkam-603110, Tamilnadu (India)
  2. (India)
  3. Surface and Nanoscience Division, Indira Gandhi Centre for Atomic Research, Kalpakkam-603102 (India)
  4. Materials Physics Division, Indira Gandhi Centre for Atomic Research, Kalpakkam-603102 (India)
Publication Date:
OSTI Identifier:
22490228
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 1665; Journal Issue: 1; Conference: 59. DAE solid state physics symposium 2014, Tamilnadu (India), 16-20 Dec 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; AMORPHOUS STATE; ANNEALING; CATALYSTS; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; GOLD; LIQUIDS; NANOWIRES; PLASMA; POLYCRYSTALS; RAMAN SPECTROSCOPY; RESOLUTION; SILICON; SOLIDS; TRANSMISSION ELECTRON MICROSCOPY; VAPORS