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Title: The sheath effect on the floating harmonic method

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.4936347· OSTI ID:22489964
; ;  [1]
  1. Department of Electrical Engineering, Hanyang University, 17 Haengdang-dong, Seongdong-gu, Seoul 133-791 (Korea, Republic of)

The floating harmonic method biases sinusoidal voltage to a probe sheath, and as its response, harmonic currents can be obtained. These currents can be used to determine the plasma parameters. However, different shapes of probes have different shapes of sheaths that can affect the diagnostic results. However, no research has been done on the sheath effect on the floating harmonic method. Therefore, we investigate the effect of the sheath during floating harmonic diagnostics by comparing cylindrical and planar probes. While the sinusoidal voltages were applied to a probe, because the sheath oscillated, the time variant ion current and their harmonic currents were added to the electron harmonic currents. In the floating harmonic method, the harmonic currents are composed of only the electron harmonic currents. Therefore, the ion harmonic currents affect the diagnostic results. In particular, the electron temperature obtained by the small probe tip was higher than that of the large probe tip. This effect was exacerbated when the ratio of the probe tip radius to the sheath length was smaller.

OSTI ID:
22489964
Journal Information:
Physics of Plasmas, Vol. 22, Issue 12; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
Country of Publication:
United States
Language:
English