Accessing a growth window for SrVO{sub 3} thin films

Brahlek, Matthew; Zhang, Lei; Eaton, Craig; Zhang, Hai-Tian; Engel-Herbert, Roman

doi:10.1063/1.4932198

Title: Accessing a growth window for SrVO{sub 3} thin films

Journal Article · Mon Oct 05 00:00:00 EDT 2015 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4932198· OSTI ID:22482221

Brahlek, Matthew; Zhang, Lei; Eaton, Craig; Zhang, Hai-Tian; Engel-Herbert, Roman ^[1]

Department of Materials Science and Engineering, Pennsylvania State University, University Park, Pennsylvania 16801 (United States)

Stoichiometric SrVO{sub 3} thin films were grown over a range of cation fluxes on (001) (La{sub 0.3}Sr{sub 0.7})(Al{sub 0.65}Ta{sub 0.35})O{sub 3} substrates using hybrid molecular beam epitaxy, where a thermal effusion cell was employed to generate a Sr flux and V was supplied using the metal-organic precursor vanadium oxytriisopropoxide (VTIP). By systematically varying the VTIP flux while keeping the Sr flux constant, a range of flux ratios were discovered in which the structural and electronic properties of the SrVO{sub 3} films remained unaltered. The intrinsic film lattice parameter and residual resistivity were found to be the smallest inside the growth window, indicating the lowest defect concentration of the films, and rapidly increased for cation flux ratios deviating from ideal growth condition. Reflection high-energy electron diffraction showed that films grown within this range had smooth surfaces and diffraction patterns were free of additional spots, while otherwise the growing surface was rough and contained additional crystalline phases. Results show the existence of a SrVO{sub 3} growth window at sufficiently high growth temperature, in which high-quality, stoichiometric films can be grown in a robust, highly reproducible manner that is invulnerable to unintentional flux variation.

Cite

Export

Save

OSTI ID:: 22482221

Journal Information:: Applied Physics Letters, Vol. 107, Issue 14; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951

Country of Publication:: United States

Language:: English

References (41)

Strongly Correlated Materials Morosan, Emilia; Natelson, Douglas; Nevidomskyy, Andriy H. Advanced Materials, Vol. 24, Issue 36 https://doi.org/10.1002/adma.201202018	journal	August 2012
Highly Conductive SrVO ₃ as a Bottom Electrode for Functional Perovskite Oxides Moyer, Jarrett A.; Eaton, Craig; Engel-Herbert, Roman Advanced Materials, Vol. 25, Issue 26 https://doi.org/10.1002/adma.201300900	journal	May 2013
Two-Dimensional Mott Insulators in SrVO ₃ Ultrathin Films Gu, Man; Wolf, Stuart A.; Lu, Jiwei Advanced Materials Interfaces, Vol. 1, Issue 7 https://doi.org/10.1002/admi.201300126	journal	June 2014
Optical properties of correlated materials - Or why intelligent windows may look dirty Tomczak, Jan M.; Biermann, Silke physica status solidi (b), Vol. 246, Issue 9 https://doi.org/10.1002/pssb.200945231	journal	September 2009
Growth of SrTiO ₃ on Si(001) by hybrid molecular beam epitaxy : Growth of SrTiO Zhang, Lei; Engel-Herbert, Roman physica status solidi (RRL) - Rapid Research Letters, Vol. 8, Issue 11 https://doi.org/10.1002/pssr.201409383	journal	September 2014
From chemical vapor epitaxy to chemical beam epitaxy Tsang, W. T. Journal of Crystal Growth, Vol. 95, Issue 1-4 https://doi.org/10.1016/0022-0248(89)90364-3	journal	February 1989
Fabrication and anomalous conducting behavior of atomically regulated superlattices Koinuma, H.; Yoshimoto, M.; Nagata, H. Solid State Communications, Vol. 80, Issue 1 https://doi.org/10.1016/0038-1098(91)90588-m	journal	October 1991
Chemical beam epitaxy — a child of surface science Lüth, Hans Surface Science, Vol. 299-300 https://doi.org/10.1016/0039-6028(94)90703-x	journal	January 1994
Laser molecular beam epitaxy of single-crystal SrVO3−x films Nagata, Hirotoshi; Tsukahara, Tadashi; Yoshimoto, Mamoru Thin Solid Films, Vol. 208, Issue 2 https://doi.org/10.1016/0040-6090(92)90654-t	journal	February 1992
Control of MBE, MOMBE and CBE growth using RHEED Foxon, C. T. Applied Surface Science, Vol. 50, Issue 1-4 https://doi.org/10.1016/0169-4332(91)90135-7	journal	June 1991
The role of MBE in recent quantum Hall effect physics discoveries Pfeiffer, Loren; West, K. W. Physica E: Low-dimensional Systems and Nanostructures, Vol. 20, Issue 1-2 https://doi.org/10.1016/j.physe.2003.09.035	journal	December 2003
Adsorption-controlled growth of PbTiO3 by reactive molecular beam epitaxy Theis, C. D.; Yeh, J.; Schlom, D. G. Thin Solid Films, Vol. 325, Issue 1-2 https://doi.org/10.1016/s0040-6090(98)00507-0	journal	July 1998
Atomically precise interfaces from non-stoichiometric deposition Nie, Y. F.; Zhu, Y.; Lee, C. -H. Nature Communications, Vol. 5, Issue 1 https://doi.org/10.1038/ncomms5530	journal	August 2014
Epitaxial SrTiO₃ films with electron mobilities exceeding 30,000 cm² V^-1 s^-1 Son, Junwoo; Moetakef, Pouya; Jalan, Bharat Nature Materials, Vol. 9, Issue 6, p. 482-484 https://doi.org/10.1038/nmat2750	journal	April 2010
Dynamic layer rearrangement during growth of layered oxide films by molecular beam epitaxy Lee, J. H.; Luo, G.; Tung, I. C. Nature Materials, Vol. 13, Issue 9 https://doi.org/10.1038/nmat4039	journal	August 2014
MBE deserves a place in the history books McCray, W. Patrick Nature Nanotechnology, Vol. 2, Issue 5 https://doi.org/10.1038/nnano.2007.121	journal	May 2007
Correlated-Electron Physics in Transition-Metal Oxides Tokura, Yoshinori Physics Today, Vol. 56, Issue 7 https://doi.org/10.1063/1.1603080	journal	July 2003
Adsorption-controlled molecular-beam epitaxial growth of BiFeO3 Ihlefeld, J. F.; Kumar, A.; Gopalan, V. Applied Physics Letters, Vol. 91, Issue 7 https://doi.org/10.1063/1.2767771	journal	August 2007
Effect of charge modulation in (LaVO3)m(SrVO3)n superlattices on the insulator-metal transition Sheets, W. C.; Mercey, B.; Prellier, W. Applied Physics Letters, Vol. 91, Issue 19 https://doi.org/10.1063/1.2805222	journal	November 2007
Materials Fundamentals of Molecular Beam Epitaxy Tsao, Jeffrey Y.; Harbison, James P. Physics Today, Vol. 46, Issue 10 https://doi.org/10.1063/1.2809075	journal	October 1993
Defects and transport in complex oxide thin films Ohnishi, Tsuyoshi; Shibuya, Keisuke; Yamamoto, Takahisa Journal of Applied Physics, Vol. 103, Issue 10 https://doi.org/10.1063/1.2921972	journal	May 2008
Molecular beam epitaxy of SrTiO3 with a growth window Jalan, Bharat; Moetakef, Pouya; Stemmer, Susanne Applied Physics Letters, Vol. 95, Issue 3 https://doi.org/10.1063/1.3184767	journal	July 2009
Stoichiometry optimization of homoepitaxial oxide thin films using x-ray diffraction LeBeau, James M.; Engel-Herbert, Roman; Jalan, Bharat Applied Physics Letters, Vol. 95, Issue 14 https://doi.org/10.1063/1.3243696	journal	October 2009
Adsorption-controlled growth of BiMnO3 films by molecular-beam epitaxy Lee, J. H.; Ke, X.; Misra, R. Applied Physics Letters, Vol. 96, Issue 26 https://doi.org/10.1063/1.3457786	journal	June 2010
Stoichiometry-driven metal-to-insulator transition in NdTiO ₃ /SrTiO ₃ heterostructures Xu, Peng; Phelan, Daniel; Seok Jeong, Jong Applied Physics Letters, Vol. 104, Issue 8 https://doi.org/10.1063/1.4866867	journal	February 2014
Surface reconstructions in molecular beam epitaxy of SrTiO ₃ Kajdos, Adam P.; Stemmer, Susanne Applied Physics Letters, Vol. 105, Issue 19 https://doi.org/10.1063/1.4901726	journal	November 2014
Self-regulated growth of LaVO3 thin films by hybrid molecular beam epitaxy Zhang, Hai-Tian; Dedon, Liv R.; Martin, Lane W. Applied Physics Letters, Vol. 106, Issue 23 https://doi.org/10.1063/1.4922213	journal	June 2015
Evolution of the spectral function in Mott-Hubbard systems with $d^{1}$ configuration Fujimori, A.; Hase, I.; Namatame, H. Physical Review Letters, Vol. 69, Issue 12 https://doi.org/10.1103/physrevlett.69.1796	journal	September 1992
Mott-Hubbard Transition versus Anderson Localization in Correlated Electron Systems with Disorder Byczuk, Krzysztof; Hofstetter, Walter; Vollhardt, Dieter Physical Review Letters, Vol. 94, Issue 5 https://doi.org/10.1103/physrevlett.94.056404	journal	February 2005
Disordered electronic systems Lee, Patrick A.; Ramakrishnan, T. V. Reviews of Modern Physics, Vol. 57, Issue 2 https://doi.org/10.1103/revmodphys.57.287	journal	April 1985
Metal-insulator transitions Imada, Masatoshi; Fujimori, Atsushi; Tokura, Yoshinori Reviews of Modern Physics, Vol. 70, Issue 4, p. 1039-1263 https://doi.org/10.1103/revmodphys.70.1039	journal	October 1998
Doping a Mott insulator: Physics of high-temperature superconductivity Lee, Patrick A.; Nagaosa, Naoto; Wen, Xiao-Gang Reviews of Modern Physics, Vol. 78, Issue 1 https://doi.org/10.1103/revmodphys.78.17	journal	January 2006
Epitaxially deposited SrVO/sub 3/ conducting films by laser ablation and metal organic chemical vapor deposition Ritums, D. L.; Wu, N. J.; Liu, D. ISAF '96. Tenth IEEE International Symposium on Applications of Ferroelectrics, ISAF '96. Proceedings of the Tenth IEEE International Symposium on Applications of Ferroelectrics https://doi.org/10.1109/isaf.1996.602778	conference	January 1996
Growth modes in metal-organic molecular beam epitaxy of TiO2 on r-plane sapphire Jalan, Bharat; Engel-Herbert, Roman; Cagnon, Joël Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 27, Issue 2 https://doi.org/10.1116/1.3065713	journal	March 2009
Growth of SrVO ₃ thin films by hybrid molecular beam epitaxy Eaton, Craig; Moyer, Jarrett A.; Alipour, Hamideh M. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Vol. 33, Issue 6 https://doi.org/10.1116/1.4927439	journal	November 2015
High-Temperature Superconducting Multilayers and Heterostructures Grown by Atomic Layer-By-Layer Molecular Beam Epitaxy Eckstein, J. N.; Bozovic, I. Annual Review of Materials Science, Vol. 25, Issue 1 https://doi.org/10.1146/annurev.ms.25.080195.003335	journal	August 1995
Pulsed Laser Deposition of Epitaxial SrVO ₃ Films on (100)LaAlO ₃ and (100)Si Yip, P. W.; Wong, K. H. MRS Proceedings, Vol. 623 https://doi.org/10.1557/proc-623-347	journal	January 2000
Metal-insulator transitions Paesler, Michael Journal of Non-Crystalline Solids, Vol. 130, Issue 1 https://doi.org/10.1016/0022-3093(91)90162-y	journal	June 1991
Disordered Electronic Systems Al'tshuler, Boris L.; Lee, Patrick A. Physics Today, Vol. 41, Issue 12 https://doi.org/10.1063/1.881139	journal	December 1988
Effect of charge modulation in (LaVO3)m(SrVO3)n superlattices on the insulator-metal transition Sheets, W. C.; Mercey, B.; Prellier, W. arXiv https://doi.org/10.48550/arxiv.0710.2476	text	January 2007
Surface Reconstructions in Molecular Beam Epitaxy of SrTiO3 Kajdos, Adam P.; Stemmer, Susanne arXiv https://doi.org/10.48550/arxiv.1410.8830	text	January 2014

Cited By (11)

High Carrier Mobility, Electrical Conductivity, and Optical Transmittance in Epitaxial SrVO ₃ Thin Films Mirjolet, Mathieu; Sánchez, Florencio; Fontcuberta, Josep Advanced Functional Materials, Vol. 29, Issue 14 https://doi.org/10.1002/adfm.201808432	journal	February 2019
Independent Tuning of Optical Transparency Window and Electrical Properties of Epitaxial SrVO ₃ Thin Films by Substrate Mismatch Mirjolet, Mathieu; Vasili, Hari Babu; López‐Conesa, LLuís Advanced Functional Materials, Vol. 29, Issue 37 https://doi.org/10.1002/adfm.201904238	journal	July 2019
Scalable Synthesis of the Transparent Conductive Oxide SrVO ₃ Shoham, Lishai; Baskin, Maria; Han, Myung‐Geun Advanced Electronic Materials, Vol. 6, Issue 1 https://doi.org/10.1002/aelm.201900584	journal	October 2019
Surface Characterizations and Selective Etching of Sr‐Rich Segregation on Top of SrVO ₃ Thin‐Films Grown by Pulsed Laser Deposition Bourlier, Yoan; Frégnaux, Mathieu; Bérini, Bruno ChemNanoMat, Vol. 5, Issue 5 https://doi.org/10.1002/cnma.201900017	journal	March 2019
Correlated metals as transparent conductors Zhang, Lei; Zhou, Yuanjun; Guo, Lu Nature Materials, Vol. 15, Issue 2 https://doi.org/10.1038/nmat4493	journal	December 2015
Scaling growth rates for perovskite oxide virtual substrates on silicon Lapano, Jason; Brahlek, Matthew; Zhang, Lei Nature Communications, Vol. 10, Issue 1 https://doi.org/10.1038/s41467-019-10273-2	journal	June 2019
Adsorption-controlled growth and the influence of stoichiometry on electronic transport in hybrid molecular beam epitaxy-grown BaSnO ₃ films Prakash, Abhinav; Xu, Peng; Wu, Xuewang Journal of Materials Chemistry C, Vol. 5, Issue 23 https://doi.org/10.1039/c7tc00190h	journal	January 2017
Mapping growth windows in quaternary perovskite oxide systems by hybrid molecular beam epitaxy Brahlek, Matthew; Zhang, Lei; Zhang, Hai-Tian Applied Physics Letters, Vol. 109, Issue 10 https://doi.org/10.1063/1.4962388	journal	September 2016
Development of a hybrid molecular beam epitaxy deposition system for in situ surface x-ray studies Andersen, Tassie K.; Cook, Seyoung; Benda, Erika Review of Scientific Instruments, Vol. 89, Issue 3 https://doi.org/10.1063/1.5008369	journal	March 2018
Synthesis science of SrRuO ₃ and CaRuO ₃ epitaxial films with high residual resistivity ratios Nair, Hari P.; Liu, Yang; Ruf, Jacob P. APL Materials, Vol. 6, Issue 4 https://doi.org/10.1063/1.5023477	journal	April 2018
Opportunities in vanadium-based strongly correlated electron systems Brahlek, Matthew; Zhang, Lei; Lapano, Jason MRS Communications, Vol. 7, Issue 1 https://doi.org/10.1557/mrc.2017.2	journal	February 2017

Similar Records

Accessing a growth window for SrVO₃ thin films

Journal Article · Mon Oct 05 00:00:00 EDT 2015 · Applied Physics Letters · OSTI ID:22482221

Brahlek, Matthew; Zhang, Lei; Eaton, Craig; +2 more

Growth of SrVO{sub 3} thin films by hybrid molecular beam epitaxy

Journal Article · Sun Nov 15 00:00:00 EST 2015 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films · OSTI ID:22482221

Eaton, Craig; Brahlek, Matthew; Engel-Herbert, Roman; +4 more

Self-regulated growth of LaVO{sub 3} thin films by hybrid molecular beam epitaxy

Journal Article · Mon Jun 08 00:00:00 EDT 2015 · Applied Physics Letters · OSTI ID:22482221

Zhang, Hai-Tian; Engel-Herbert, Roman; Dedon, Liv R.; +1 more

Related Subjects

36 MATERIALS SCIENCE
71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ABUNDANCE
CATIONS
ELECTRON DIFFRACTION
LATTICE PARAMETERS
MOLECULAR BEAM EPITAXY
ORGANOMETALLIC COMPOUNDS
STOICHIOMETRY
SUBSTRATES
SURFACES
THIN FILMS
VANADIUM

Title: Accessing a growth window for SrVO{sub 3} thin films

Citation Formats

References (41)

Cited By (11)

Similar Records

Related Subjects