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Title: A method to determine the number of nanoparticles in a cluster using conventional optical microscopes

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4930994· OSTI ID:22482049
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  1. Semiconductor and Dimensional Metrology Division, PML, NIST, Gaithersburg, Maryland 20899 (United States)

We present a method that uses conventional optical microscopes to determine the number of nanoparticles in a cluster, which is typically not possible using traditional image-based optical methods due to the diffraction limit. The method, called through-focus scanning optical microscopy (TSOM), uses a series of optical images taken at varying focus levels to achieve this. The optical images cannot directly resolve the individual nanoparticles, but contain information related to the number of particles. The TSOM method makes use of this information to determine the number of nanoparticles in a cluster. Initial good agreement between the simulations and the measurements is also presented. The TSOM method can be applied to fluorescent and non-fluorescent as well as metallic and non-metallic nano-scale materials, including soft materials, making it attractive for tag-less, high-speed, optical analysis of nanoparticles down to 45 nm diameter.

OSTI ID:
22482049
Journal Information:
Applied Physics Letters, Vol. 107, Issue 10; Other Information: (c) 2015 U.S. Government; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English