Effects of defect density on ultrathin graphene-based metal diffusion barriers

Journal Article · Sun Nov 15 00:00:00 EST 2015 · Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films

DOI:https://doi.org/10.1116/1.4929833· OSTI ID:22479676

Oh, Sooyeoun; Jung, Younghun; Kim, Jihyun ^[1]

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1. Department of Chemical and Biological Engineering, Korea University, Seoul 136-701 (Korea, Republic of)

The authors investigated the effects of defect density on the performance of monolayer graphene as a barrier to metal diffusion. The defects were introduced to the graphene by controlled ultraviolet-ozone irradiation. The barrier performance of pristine graphene was found to be superior to that of defective graphene at temperatures up to 700 °C. Changes in surface morphology were more prevalent in the defective graphene-based films than in the pristine graphene-based film; the thermal stability of graphene films depends on their defect density. Defect density was found to be a determining factor in the barrier performance of graphene.

• OSTI ID: 22479676
• Journal Information: Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films, Vol. 33, Issue 6; Other Information: (c) 2015 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA); ISSN 0734-2101
• Country of Publication: United States
• Language: English

Related Subjects

42 ENGINEERING
CRYSTAL DEFECTS
DIFFUSION BARRIERS
FILMS
GRAPHENE
IRRADIATION
METALS
MORPHOLOGY
OZONE
PERFORMANCE
STABILITY
SURFACES
ULTRAVIOLET RADIATION