Experimental evidence of warm electron populations in magnetron sputtering plasmas

Journal Article · Wed Jan 21 00:00:00 EST 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4905901· OSTI ID:22412952

Han, Jeon G.; Kim, Hye R. ^[1]; Ishikawa, K.; Hori, M. ^[2]

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1. NU-SKKU Joint Institute Plasma-Nano Materials (IPNM), Center for Advance Plasma Surface Technology (CAPST), School of Materials Science and Engineering, Sungkyunkwan University, Suwon (Korea, Republic of)
2. Plama Nanotechnology Research Center, Nagoya University, Nagoya (Japan)

This work report on the results obtained using the Langmuir probe (LP) measurements in high-power dc magnetron sputtering discharges. Data show clear evidence of two electron components, such as warm and bulk electrons, in the sputtering plasma in a magnetic trap. We have also used optical emission spectroscopy diagnostic method along with LP to investigate the plasma production. Data show that there is a presence of low-frequency oscillations in the 2–3 MHz range, which are expected to be generated by high-frequency waves. Analysis also suggests that the warm electrons, in the plasmas, can be formed due to the collisionless Landau damping of the bulk electrons.

• OSTI ID: 22412952
• Journal Information: Journal of Applied Physics, Vol. 117, Issue 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ELECTRIC DISCHARGES
ELECTRONS
EMISSION SPECTROSCOPY
LANDAU DAMPING
LANGMUIR PROBE
MAGNETRONS
MHZ RANGE
OSCILLATIONS
PLASMA DIAGNOSTICS
PLASMA PRODUCTION
SPUTTERING
TRAPS