Effects of argon gas pressure on its metastable-state density in high-density plasmas
The effect of argon gas pressure on its metastable density in inductively coupled plasmas (ICPs) is investigated by using the laser-induced fluorescence method. Our results show that the metastable-state density of argon varies with the gas pressure depending on the measurement position; the density decreases with the pressure at a position far from the ICP antenna, whereas it increases with the pressure at a position near the antenna. This contrast in the metastable-state density trend with the pressure is explained by considering the electron temperature variations at the two measurement positions. The theoretical interpretation and calculation using a global model are also addressed in detail in this paper.
- OSTI ID:
- 22410358
- Journal Information:
- Physics of Plasmas, Vol. 22, Issue 5; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
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