Initial growth process of Co (Pd) layers on a Pd (Co) surface
Journal Article
·
· Journal of Applied Physics
- Imaging Science and Engineering Laboratory, Tokyo Institute of Technology, 4259-J3-15 Nagatsuta, Midori-ku, Yokohama 226-8503 (Japan)
- Department of Innovative and Engineered Materials, Tokyo Institute of Technology, 4259-J2-41 Nagatsuta, Midori-ku, Yokohama 226-8502 (Japan)
The deposition process of ultra-thin Co and Pd layers is studied using DC magnetron sputtering and ex situ atomic force microscopy (AFM). It is found that observation with AFM in the air atmosphere is reliable to discuss nucleation of Co and Pd crystallites. It is discussed that a Co ultra-thin layer is formed primarily through the process of two-dimensional island formation, whereas a Pd ultra-thin layer is formed through the process of mixed two- and three-dimensional island formation. On the basis of those results, Co/Pd multilayers having a flat top surface are prepared successfully.
- OSTI ID:
- 22409924
- Journal Information:
- Journal of Applied Physics, Vol. 117, Issue 17; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
- Country of Publication:
- United States
- Language:
- English
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