Particle visualization in high-power impulse magnetron sputtering. I. 2D density mapping

Journal Article · Tue Apr 28 00:00:00 EDT 2015 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4919006· OSTI ID:22402906

Britun, Nikolay; Palmucci, Maria; Konstantinidis, Stephanos ^[1]; Snyders, Rony ^[1]

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1. Chimie des Interactions Plasma-Surface (ChIPS), CIRMAP, Université de Mons, 23 Place du Parc, B-7000 Mons (Belgium)

Time-resolved characterization of an Ar-Ti high-power impulse magnetron sputtering discharge has been performed. This paper deals with two-dimensional density mapping in the discharge volume obtained by laser-induced fluorescence imaging. The time-resolved density evolution of Ti neutrals, singly ionized Ti atoms (Ti{sup +}), and Ar metastable atoms (Ar{sup met}) in the area above the sputtered cathode is mapped for the first time in this type of discharges. The energetic characteristics of the discharge species are additionally studied by Doppler-shift laser-induced fluorescence imaging. The questions related to the propagation of both the neutral and ionized discharge particles, as well as to their spatial density distributions, are discussed.

• OSTI ID: 22402906
• Journal Information: Journal of Applied Physics, Vol. 117, Issue 16; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATOMS
DENSITY
DOPPLER EFFECT
ELECTROMAGNETIC PULSES
FLUORESCENCE
MAGNETRONS
MAPPING
METASTABLE STATES
PARTICLES
SPUTTERING
TIME RESOLUTION
TITANIUM
TWO-DIMENSIONAL SYSTEMS