The local crystallization in nanoscale diamond-like carbon films during annealing
- Problems of Ion-plasma Technologies Development and Implementation Scientific and Research Laboratory, Belgorod State University, 85 Pobeda Str., Belgorod 308015 (Russian Federation)
- Nanostructured Materials and Nanotechnologies Science Education and Innovation Centre, 2A Koroleva Street, Belgorod 308034 (Russian Federation)
The local crystallization during annealing at 600 °C in nanoscale diamond-like carbon coatings films grown by pulsed vacuum-arc deposition method was observed using modern techniques of high-resolution transmission electron microscopy. The crystallites formed by annealing have a face-centred cubic crystal structure and grow in the direction [01{sup ¯}1{sup ¯}] as a normal to the film surface. The number and size of the crystallites depend on the initial values of the intrinsic stresses before annealing, which in turn depend on the conditions of film growth. The sizes of crystallites are 10 nm for films with initial compressive stresses of 3 GPa and 17 nm for films with initial compressive stresses of 12 GPa. Areas of local crystallization arising during annealing have a structure different from the graphite. Additionally, the investigation results of the structure of nanoscale diamond-like carbon coatings films using Raman spectroscopy method are presented, which are consistent with the transmission electron microscopy research results.
- OSTI ID:
- 22395496
- Journal Information:
- Applied Physics Letters, Vol. 105, Issue 23; Other Information: (c) 2014 U.S. Government; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Fluctuation microscopy studies of medium-range ordering in amorphous diamond-like carbon films.
Nanostructural study of the thermal transformation of diamond-like amorphous carbon into an ultrahard carbon nanocomposite