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Title: Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors

Abstract

An adaptive Kirkpatrick–Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.

Authors:
; ; ;  [1];  [2]; ; ; ;  [3];  [1]
  1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. Research Institute for Electronic Science, Hokkaido University, Kita 21 Nishi 10, Kita-ku, Sapporo 001-0021 (Japan)
  3. SPring-8/RIKEN, 1-1-1 Kouto, Sayo, Hyogo 679-5198 (Japan)
Publication Date:
OSTI Identifier:
22392437
Resource Type:
Journal Article
Journal Name:
Review of Scientific Instruments
Additional Journal Information:
Journal Volume: 86; Journal Issue: 4; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ACCURACY; COMPARATIVE EVALUATIONS; ELECTRIC POTENTIAL; ERRORS; FOCUSING; HARD X RADIATION; MIRRORS; OPTICS; PEAKS; PERFORMANCE; PIEZOELECTRICITY; SHAPE; SPRING-8 STORAGE RING; WAVELENGTHS

Citation Formats

Goto, Takumi, Nakamori, Hiroki, Sano, Yasuhisa, Matsuyama, Satoshi, Kimura, Takashi, Kohmura, Yoshiki, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, and CREST, JST, 2-1 Yamada-oka, Suita, Osaka 565-0871. Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors. United States: N. p., 2015. Web. doi:10.1063/1.4916617.
Goto, Takumi, Nakamori, Hiroki, Sano, Yasuhisa, Matsuyama, Satoshi, Kimura, Takashi, Kohmura, Yoshiki, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, & CREST, JST, 2-1 Yamada-oka, Suita, Osaka 565-0871. Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors. United States. https://doi.org/10.1063/1.4916617
Goto, Takumi, Nakamori, Hiroki, Sano, Yasuhisa, Matsuyama, Satoshi, Kimura, Takashi, Kohmura, Yoshiki, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, Yamauchi, Kazuto, Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, and CREST, JST, 2-1 Yamada-oka, Suita, Osaka 565-0871. 2015. "Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors". United States. https://doi.org/10.1063/1.4916617.
@article{osti_22392437,
title = {Hard X-ray nanofocusing using adaptive focusing optics based on piezoelectric deformable mirrors},
author = {Goto, Takumi and Nakamori, Hiroki and Sano, Yasuhisa and Matsuyama, Satoshi and Kimura, Takashi and Kohmura, Yoshiki and Tamasaku, Kenji and Yabashi, Makina and Ishikawa, Tetsuya and Yamauchi, Kazuto and Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 and CREST, JST, 2-1 Yamada-oka, Suita, Osaka 565-0871},
abstractNote = {An adaptive Kirkpatrick–Baez mirror focusing optics based on piezoelectric deformable mirrors was constructed at SPring-8 and its focusing performance characteristics were demonstrated. By adjusting the voltages applied to the deformable mirrors, the shape errors (compared to a target elliptical shape) were finely corrected on the basis of the mirror shape determined using the pencil-beam method, which is a type of at-wavelength figure metrology in the X-ray region. The mirror shapes were controlled with a peak-to-valley height accuracy of 2.5 nm. A focused beam with an intensity profile having a full width at half maximum of 110 × 65 nm (V × H) was achieved at an X-ray energy of 10 keV.},
doi = {10.1063/1.4916617},
url = {https://www.osti.gov/biblio/22392437}, journal = {Review of Scientific Instruments},
issn = {0034-6748},
number = 4,
volume = 86,
place = {United States},
year = {Wed Apr 15 00:00:00 EDT 2015},
month = {Wed Apr 15 00:00:00 EDT 2015}
}