A compact time-of-flight mass spectrometer for ion source characterization

Journal Article · Sun Mar 15 00:00:00 EDT 2015 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4914588· OSTI ID:22392431

Wan, X.; Jin, D. Z.; Tan, X. H. ^[1]; Huang, Z. X. ^[2]; Tan, G. B. ^[3]

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1. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang, Sichuan 621900 (China)
2. Institute of Atmosphere Environment Security and Pollution Control, Jinan University, Guangzhou 510632 (China)
3. School of Environmental and Chemical Engineering, Institute of Environmental Pollution and Health, Shanghai University, Shanghai 200444 (China)

A compact time-of-flight mass spectrometer with overall dimension of about 413 × 250 × 414 mm based on orthogonal injection and angle reflection has been developed for ion source characterization. Configuration and principle of the time-of-flight mass spectrometer are introduced in this paper. The mass resolution is optimized to be about 1690 (FWHM), and the ion energy detection range is tested to be between about 3 and 163 eV with the help of electron impact ion source. High mass resolution and compact configuration make this spectrometer useful to provide a valuable diagnostic for ion spectra fundamental research and study the mass to charge composition of plasma with wide range of parameters.

• OSTI ID: 22392431
• Journal Information: Review of Scientific Instruments, Vol. 86, Issue 3; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
DETECTION
EV RANGE
ION SOURCES
MASS RESOLUTION
PLASMA
REFLECTION
SPECTRA
TIME-OF-FLIGHT MASS SPECTROMETERS