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Title: Plasma characteristics of argon glow discharge produced by AC power supply operating at low frequencies

Journal Article · · AIP Conference Proceedings
DOI:https://doi.org/10.1063/1.4915243· OSTI ID:22391558
;  [1]
  1. Department of Physics, Facuty of Science, Chulalongkorn University, Bangkok (Thailand)

Non-thermal properties of Argon glow discharge operating with various operating pressures were measured and presented in this work. The Argon plasma is produced by a parallel conducting electrodes coupling with a high voltage AC power supply. The power supply can generate high AC voltage at various frequencies. The frequencies for the operation are in the range of a few kHz. The system is capable of generating electric field between the two metal electrodes discharge system. The characteristics of plasma produced were measured by optical emission spectroscopy (OES) technique where electron temperature (T{sub e}) and electron number density (n{sub e}) can be determined by line intensity ratio method. The value of electron number density was then determined from the Saha-Eggert equation. Our results show that the electron number density of the discharge obtained is of the order of 10{sup −17} − 10{sup −18} m{sup −3} where the electron temperature is between 1.00−2.00 eV for various operating frequencies used which are in good agreement with similar results published earlier.

OSTI ID:
22391558
Journal Information:
AIP Conference Proceedings, Vol. 1657, Issue 1; Conference: PERFIK 2014: National Physics Conference 2014, Kuala Lumpur (Malaysia), 18-19 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
Country of Publication:
United States
Language:
English