Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Journal Article · Fri Apr 24 00:00:00 EDT 2015 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4915242· OSTI ID:22391557

Jayapalan, Kanesh K.; Chin, Oi Hoong ^[1]

---

1. Plasma Technology Research Centre, Department of Physics, University of Malaya, 50603 Kuala Lumpur (Malaysia)

Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

• OSTI ID: 22391557
• Journal Information: AIP Conference Proceedings, Vol. 1657, Issue 1; Conference: PERFIK 2014: National Physics Conference 2014, Kuala Lumpur (Malaysia), 18-19 Nov 2014; Other Information: (c) 2015 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
COMPARATIVE EVALUATIONS
COMPUTERIZED SIMULATION
ELECTRON TEMPERATURE
EMISSION SPECTROSCOPY
MHZ RANGE
NEUTRAL PARTICLES
PLASMA DENSITY
PLASMA DIAGNOSTICS
PLASMA HEATING
PLASMA PRESSURE
PLASMA SIMULATION
RESOLUTION
SENSITIVITY
SPATIAL DISTRIBUTION
TEMPERATURE MEASUREMENT