Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation

Sokolov, V I; Marusin, N V; Panchenko, V Ya; Savelyev, A G; Seminogov, V N; Khaydukov, E V

doi:10.1070/QE2013V043N12ABEH015272

Title: Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation

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Abstract

We propose a method for measuring simultaneously the refractive index n{sub f}, extinction coefficient m{sub f} and thickness H{sub f} of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of n{sub f}, m{sub f} and H{sub f} are found by minimising the functional φ = [N{sup -1}Σ{sup N}{sub i=1}(R{sub exp}(θ{sub i}) – R{sub thr}(θ{sub i})){sup 2}]{sup 1/2}, where R{sub exp}(θ{sub i}) and R{sub thr}(θ{sub i}) are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence θ{sub i}. The errors in determining n{sub f}, m{sub f} and H{sub f} by this method are ±2 × 10{sup -4}, ±1 × 10{sup -3} and ±0.5%, respectively. (fiber and integrated optics)

Authors:

Sokolov, V I; Marusin, N V; Panchenko, V Ya; Savelyev, A G; Seminogov, V N; Khaydukov, E V ^[1]

Institute on Laser and Information Technologies, Russian Academy of Sciences, Shatura, Moscow Region (Russian Federation)

Publication Date:: Tue Dec 31 00:00:00 EST 2013

OSTI Identifier:: 22373654

Resource Type:: Journal Article

Journal Name:: Quantum Electronics (Woodbury, N.Y.)

Additional Journal Information:: Journal Volume: 43; Journal Issue: 12; Other Information: Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1063-7818

Country of Publication:: United States

Language:: English

Subject:: 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; EXCITATION; INCIDENCE ANGLE; LASERS; OPTICS; POLARIZATION; REFLECTION; REFRACTIVE INDEX; THICKNESS; THIN FILMS; WAVEGUIDES

Citation Formats


                    Sokolov, V I, Marusin, N V, Panchenko, V Ya, Savelyev, A G, Seminogov, V N, and Khaydukov, E V. Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation.  United States: N. p., 2013. 
        Web.  doi:10.1070/QE2013V043N12ABEH015272.

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                    Sokolov, V I, Marusin, N V, Panchenko, V Ya, Savelyev, A G, Seminogov, V N, & Khaydukov, E V. Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation.  United States.  https://doi.org/10.1070/QE2013V043N12ABEH015272

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                    Sokolov, V I, Marusin, N V, Panchenko, V Ya, Savelyev, A G, Seminogov, V N, and Khaydukov, E V. 2013.  
        "Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation".  United States.  https://doi.org/10.1070/QE2013V043N12ABEH015272.

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@article{osti_22373654,

  title        = {Determination of refractive index, extinction coefficient and thickness of thin films by the method of waveguide mode excitation},

  author       = {Sokolov, V I and Marusin, N V and Panchenko, V Ya and Savelyev, A G and Seminogov, V N and Khaydukov, E V},

  abstractNote = {We propose a method for measuring simultaneously the refractive index n{sub f}, extinction coefficient m{sub f} and thickness H{sub f} of thin films. The method is based on the resonant excitation of waveguide modes in the film by a TE- or a TM-polarised laser beam in the geometry of frustrated total internal reflection. The values of n{sub f}, m{sub f} and H{sub f} are found by minimising the functional φ = [N{sup -1}Σ{sup N}{sub i=1}(R{sub exp}(θ{sub i}) – R{sub thr}(θ{sub i})){sup 2}]{sup 1/2}, where R{sub exp}(θ{sub i}) and R{sub thr}(θ{sub i}) are the experimental and theoretical coefficients of reflection of the light beam from the interface between the measuring prism and the film at an angle of incidence θ{sub i}. The errors in determining n{sub f}, m{sub f} and H{sub f} by this method are ±2 × 10{sup -4}, ±1 × 10{sup -3} and ±0.5%, respectively. (fiber and integrated optics)},

  doi          = {10.1070/QE2013V043N12ABEH015272},

  url          = {https://www.osti.gov/biblio/22373654},
  journal      = {Quantum Electronics (Woodbury, N.Y.)},

  issn         = {1063-7818},

  number       = 12,

  volume       = 43,

  place        = {United States},

  year         = {Tue Dec 31 00:00:00 EST 2013},

  month        = {Tue Dec 31 00:00:00 EST 2013}

}

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