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Title: Optical spring effect in nanoelectromechanical systems

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4893379· OSTI ID:22317985
; ; ;  [1];  [2]
  1. Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore 117576 (Singapore)
  2. Institute of Materials Research and Engineering, A*STAR (Agency for Science, Technology, and Research), 3 Research Link, Singapore 117602 (Singapore)

In this Letter, we report a hybrid system consisting of nano-optical and nano-mechanical springs, in which the optical spring effect works to adjust the mechanical frequency of a nanoelectromechanical systems resonator. Nano-scale folded beams are fabricated as the mechanical springs and double-coupled one-dimensional photonic crystal cavities are used to pump the “optical spring.” The dynamic characteristics of this hybrid system are measured and analyzed at both low and high input optical powers. This study leads the physical phenomenon of optomechanics in complex nano-opto-electro-mechanical systems (NOEMS) and could benefit the future applications of NOEMS in chip-level communication and sensing.

OSTI ID:
22317985
Journal Information:
Applied Physics Letters, Vol. 105, Issue 6; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English