Effects of polycrystallinity in nano patterning by ion-beam sputtering

Journal Article · Mon Jul 14 00:00:00 EDT 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4889976· OSTI ID:22308979

Yoon, Sun Mi; Yoon, D.; Cheong, H. ^[1]; Kim, Y.; Lee, H. H. ^[2]

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1. Department of Physics, Sogang University, Seoul 121-742 (Korea, Republic of)
2. Beamline Research Division, Pohang Accelerator Laboratory (PAL), Pohang 790-784 (Korea, Republic of)

Employing graphites with distinctly different mean grain sizes, we study the effects of polycrystallinity on the pattern formation by ion-beam sputtering. The grains influence the growth of the ripples in a highly anisotropic fashion; both the mean uninterrupted ripple length along the ridges and the surface width depend on the mean size of the grains, which is attributed to the large sputter yield at the grain boundary compared with that on the terrace. In contrast, the ripple wavelength does not depend on the mean size of the grains, indicating that the mass transport across the grain boundaries should efficiently proceed by both thermal diffusion and ion-induced processes.

• OSTI ID: 22308979
• Journal Information: Journal of Applied Physics, Vol. 116, Issue 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANISOTROPY
BEAMS
CRYSTAL GROWTH
GRAIN BOUNDARIES
GRAIN SIZE
GRAPHITE
MASS
SPUTTERING
SURFACES
THERMAL DIFFUSION
WAVELENGTHS