60 keV Ar⁺-ion induced modification of microstructural, compositional, and vibrational properties of InSb

Journal Article · Tue Oct 14 00:00:00 EDT 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4897537· OSTI ID:22305781

Datta, D. P.; Garg, S. K.; Satpati, B. ^[1]; Sahoo, P. K. ^[2]; Kanjilal, A. ^[3]; Dhara, S. ^[4]; Kanjilal, D. ^[5]

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1. Surface Physics and Materials Science Division, Saha Institute of Nuclear Physics, 1/AF Bidhannagar, Kolkata 700064 (India)
2. School of Physical Sciences, National Institute of Science Education and Research, Bhubaneswar 751005, Odisha (India)
3. Department of Physics, Shiv Nadar University, Uttar Pradesh 203207 (India)
4. Surface and Nanoscience Division, Materials Science Group, Indira Gandhi Centre for Atomic Research, Kalpakkam 603102 (India)
5. Inter-University Accelerator Centre, Aruna Asaf Ali Marg, New Delhi 110067 (India)

Room temperature irradiation of InSb(111) by 60 keV Ar⁺-ions at normal (0°) and oblique (60°) angles of incidence led to the formation of nanoporous structure in the high fluence regime of 1×10¹⁷ to 3×10¹⁸ ions cm⁻². While a porous layer comprising of a network of interconnected nanofibers was generated by normal ion incidence, evolution of plate-like structures was observed for obliquely incident ions. Systematic studies of composition and structure using energy dispersive x-ray spectroscopy, Raman spectroscopy, x-ray photoelectron spectroscopy, Raman mapping, grazing incidence x-ray diffraction, and cross-sectional transmission electron microscopy revealed a high degree of oxidation of the ion-induced microstructures with the presence of In₂O₃ and Sb₂O₃ phases and presence of nanocrystallites within the nanoporous structures. The observed structural evolution was understood in terms of processes driven by ion-induced defect accumulation within InSb.

• OSTI ID: 22305781
• Journal Information: Journal of Applied Physics, Vol. 116, Issue 14; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Publisher: American Institute of Physics (AIP)
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ANTIMONY OXIDES
ARGON IONS
CRYSTAL DEFECTS
EVOLUTION
INCIDENCE ANGLE
INDIUM ANTIMONIDES
INDIUM OXIDES
KEV RANGE 10-100
LAYERS
MICROSTRUCTURE
MODIFICATIONS
NANOSTRUCTURES
OXIDATION
POROUS MATERIALS
RAMAN SPECTROSCOPY
TEMPERATURE RANGE 0273-0400 K
TRANSMISSION ELECTRON MICROSCOPY
X-RAY DIFFRACTION
X-RAY PHOTOELECTRON SPECTROSCOPY
X-RAY SPECTROSCOPY