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Title: Kinetics of silicide formation over a wide range of heating rates spanning six orders of magnitude

Kinetic processes involving intermediate phase formation are often assumed to follow an Arrhenius temperature dependence. This behavior is usually inferred from limited data over narrow temperature intervals, where the exponential dependence is generally fully satisfied. However, direct evidence over wide temperature intervals is experimentally challenging and data are scarce. Here, we report a study of silicide formation between a 12 nm film of palladium and 15 nm of amorphous silicon in a wide range of heating rates, spanning six orders of magnitude, from 0.1 to 10{sup 5 }K/s, or equivalently more than 300 K of variation in reaction temperature. The calorimetric traces exhibit several distinct exothermic events related to interdiffusion, nucleation of Pd{sub 2}Si, crystallization of amorphous silicon, and vertical growth of Pd{sub 2}Si. Interestingly, the thickness of the initial nucleation layer depends on the heating rate revealing enhanced mass diffusion at the fastest heating rates during the initial stages of the reaction. In spite of this, the formation of the silicide strictly follows an Arrhenius temperature dependence over the whole temperature interval explored. A kinetic model is used to fit the calorimetric data over the complete heating rate range. Calorimetry is complemented by structural analysis through transmission electron microscopy and both standard andmore » in-situ synchrotron X-ray diffraction.« less
Authors:
; ; ; ;  [1] ;  [2] ;  [1] ;  [3]
  1. Grup de Nanomaterials i Microsistemes, Departament de Física, Universitat Autònoma de Barcelona, 08193 Bellaterra (Spain)
  2. ALBA Synchrotron Light Facility, 08290 Cerdanyola del Vallès (Spain)
  3. (Spain)
Publication Date:
OSTI Identifier:
22303954
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 105; Journal Issue: 1; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; ACTIVATION ENERGY; CALORIMETRY; CRYSTAL GROWTH; CRYSTALLIZATION; DIFFUSION; FILMS; HEATING RATE; LAYERS; MASS; PALLADIUM; PALLADIUM SILICIDES; SILICON; SYNCHROTRON RADIATION; TEMPERATURE DEPENDENCE; THICKNESS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY DIFFRACTION