Rapid, non-destructive evaluation of ultrathin WSe{sub 2} using spectroscopic ellipsometry
- Department of Materials Science and Engineering, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
- Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
The utilization of tungsten diselenide (WSe{sub 2}) in electronic and optoelectronic devices depends on the ability to understand and control the process-property relationship during synthesis. We demonstrate that spectroscopic ellipsometry is an excellent technique for accurate, non-destructive determination of ultra-thin (<30 nm) WSe{sub 2} properties. The refractive index (n) and extinction coefficient (k) were found to be independent of thickness down to 1.3 nm, and were used to determine film thickness, which was confirmed to be within 9% of values found via atomic force microscopy. Finally, the optical bandgap was found to closely correlate with thickness, ranging from 1.2 to 1.55 eV as the WSe{sub 2} is thinned to the equivalent of 2 atomic layers.
- OSTI ID:
- 22303562
- Journal Information:
- APL Materials, Vol. 2, Issue 9; Other Information: (c) 2014 Author(s); Country of input: International Atomic Energy Agency (IAEA); ISSN 2166-532X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Synthetic WSe2 monolayers with high photoluminescence quantum yield
Non-destructive characterization of corroded glass surfaces by spectroscopic ellipsometry