Plasma interactions determine the composition in pulsed laser deposited thin films
- Paul Scherrer Institute, CH-5232 Villigen PSI (Switzerland)
- Laboratory of Ion Beam Physics, ETH Zurich, CH-8093 Zurich (Switzerland)
Plasma chemistry and scattering strongly affect the congruent, elemental transfer during pulsed laser deposition of target metal species in an oxygen atmosphere. Studying the plasma properties of La{sub 0.6}Sr{sub 0.4}MnO{sub 3}, we demonstrate for as grown La{sub 0.6}Sr{sub 0.4}MnO{sub 3-δ} films that a congruent transfer of metallic species is achieved in two pressure windows: ∼10{sup −3} mbar and ∼2 × 10{sup −1} mbar. In the intermediate pressure range, La{sub 0.6}Sr{sub 0.4}MnO{sub 3-δ} becomes cation deficient and simultaneously almost fully stoichiometric in oxygen. Important for thin film growth is the presence of negative atomic oxygen and under which conditions positive metal-oxygen ions are created in the plasma. This insight into the plasma chemistry shows why the pressure window to obtain films with a desired composition and crystalline structure is narrow and requires a careful adjustment of the process parameters.
- OSTI ID:
- 22303548
- Journal Information:
- Applied Physics Letters, Vol. 105, Issue 11; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Optimization of La{sub 0.7}Ba{sub 0.3}MnO{sub 3-{delta}} complex oxide laser ablation conditions by plume imaging and optical emission spectroscopy
Pulsed laser deposition of transition metal oxides for secondary batteries