Bendable ZnO thin film surface acoustic wave devices on polyethylene terephthalate substrate

Journal Article · Mon May 26 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4879850· OSTI ID:22300156

He, Xingli; Guo, Hongwei; Chen, Jinkai; Wang, Wenbo; Xuan, Weipeng; Xu, Yang ^[1]; Luo, Jikui ^[1]

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1. Department of Info. Sci. and Electron. Eng., Zhejiang University and Cyrus Tang Center for Sensor Mater. and Appl., 38 Zheda Road, Hangzhou 310027 (China)

Bendable surface acoustic wave (SAW) devices were fabricated using high quality c-axis orientation ZnO films deposited on flexible polyethylene terephthalate substrates at 120 °C. Dual resonance modes, namely, the zero order pseudo asymmetric (A{sub 0}) and symmetric (S{sub 0}) Lamb wave modes, have been obtained from the SAW devices. The SAW devices perform well even after repeated flexion up to 2500 με for 100 times, demonstrating its suitability for flexible electronics application. The SAW devices are also highly sensitive to compressive and tensile strains, exhibiting excellent anti-strain deterioration property, thus, they are particularly suitable for sensing large strains.

• OSTI ID: 22300156
• Journal Information: Applied Physics Letters, Vol. 104, Issue 21; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ASYMMETRY
EQUIPMENT
POLYESTERS
SOUND WAVES
STRAINS
SUBSTRATES
SURFACES
SYMMETRY
THIN FILMS
ZINC OXIDES