Microcantilevers with embedded accelerometers for dynamic atomic force microscopy

Journal Article · Mon Feb 24 00:00:00 EST 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4866664· OSTI ID:22293081

Shaik, Nurul Huda; Raman, Arvind ^[1]; Reifenberger, Ronald G. ^[2]

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1. School of Mechanical Engineering, Purdue University, West Lafayette, Indiana 47907 (United States)
2. Department of Physics, Purdue University, West Lafayette, Indiana 47907 (United States)

The measurement of the intermittent interaction between an oscillating nanotip and the sample surface is a key challenge in dynamic Atomic Force Microscopy (AFM). Accelerometers integrated onto AFM cantilevers can directly measure this interaction with minimal cantilever modification but have been difficult to realize. Here, we design and fabricate high frequency bandwidth accelerometers on AFM cantilevers to directly measure the tip acceleration in commercial AFM systems. We demonstrate a simple way of calibrating such accelerometers and present experiments using amplitude modulated AFM on freshly cleaved mica samples in water to study the response of the accelerometer.

• OSTI ID: 22293081
• Journal Information: Applied Physics Letters, Vol. 104, Issue 8; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ACCELEROMETERS
AMPLITUDES
ATOMIC FORCE MICROSCOPY
INTERACTIONS
MICA
MODULATION
WATER