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Title: The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate

Abstract

Micro-scale pentacene organic field effect transistors (OFETs) were fabricated on a flexible poly(ethylene terephthalate) (PET) substrate. By applying a highly fluorinated developing solvents and its compatible photoresist materials, it has become possible to make the micro-scale patterning for organic devices using standard photolithography without damaging the underlying polymer layers. The flexible pentacene OFETs with 3 μm-sized channel length exhibited stable electrical characteristics under bent configurations and under a large number of repetitive bending cycles. Furthermore, we demonstrated micro-scale organic complementary inverters on a flexible PET substrate using p-type pentacene and n-type copper hexadecafluorophthalocyanine materials.

Authors:
; ; ; ; ; ;  [1]; ;  [2]
  1. Department of Physics and Astronomy, and Institute of Applied Physics, Seoul National University, Seoul 151-747 (Korea, Republic of)
  2. Department of Polymer Science and Engineering, Inha University, Incheon 402-751 (Korea, Republic of)
Publication Date:
OSTI Identifier:
22283283
Resource Type:
Journal Article
Journal Name:
Applied Physics Letters
Additional Journal Information:
Journal Volume: 104; Journal Issue: 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; FIELD EFFECT TRANSISTORS; INVERTERS; LAYERS; MASKING; ORGANIC POLYMERS; PENTACENE; PHOTOCONDUCTIVITY; SOLVENTS; SUBSTRATES

Citation Formats

Jang, Jingon, Song, Younggul, Yoo, Daekyoung, Kim, Dongku, Lee, Hyungwoo, Hong, Seunghun, Lee, Takhee, Oh, Hyuntaek, and Lee, Jin-Kyun. The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate. United States: N. p., 2014. Web. doi:10.1063/1.4863678.
Jang, Jingon, Song, Younggul, Yoo, Daekyoung, Kim, Dongku, Lee, Hyungwoo, Hong, Seunghun, Lee, Takhee, Oh, Hyuntaek, & Lee, Jin-Kyun. The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate. United States. https://doi.org/10.1063/1.4863678
Jang, Jingon, Song, Younggul, Yoo, Daekyoung, Kim, Dongku, Lee, Hyungwoo, Hong, Seunghun, Lee, Takhee, Oh, Hyuntaek, and Lee, Jin-Kyun. 2014. "The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate". United States. https://doi.org/10.1063/1.4863678.
@article{osti_22283283,
title = {The application of orthogonal photolithography to micro-scale organic field effect transistors and complementary inverters on flexible substrate},
author = {Jang, Jingon and Song, Younggul and Yoo, Daekyoung and Kim, Dongku and Lee, Hyungwoo and Hong, Seunghun and Lee, Takhee and Oh, Hyuntaek and Lee, Jin-Kyun},
abstractNote = {Micro-scale pentacene organic field effect transistors (OFETs) were fabricated on a flexible poly(ethylene terephthalate) (PET) substrate. By applying a highly fluorinated developing solvents and its compatible photoresist materials, it has become possible to make the micro-scale patterning for organic devices using standard photolithography without damaging the underlying polymer layers. The flexible pentacene OFETs with 3 μm-sized channel length exhibited stable electrical characteristics under bent configurations and under a large number of repetitive bending cycles. Furthermore, we demonstrated micro-scale organic complementary inverters on a flexible PET substrate using p-type pentacene and n-type copper hexadecafluorophthalocyanine materials.},
doi = {10.1063/1.4863678},
url = {https://www.osti.gov/biblio/22283283}, journal = {Applied Physics Letters},
issn = {0003-6951},
number = 5,
volume = 104,
place = {United States},
year = {Mon Feb 03 00:00:00 EST 2014},
month = {Mon Feb 03 00:00:00 EST 2014}
}