Single-crystal superconducting nanowires of NbSe{sub 2} fabricated by reactive plasma etching
- Department of Physics and Materials Research Institute, The Pennsylvania State University, University Park, Pennsylvania 16802 (United States)
- Department of Physics, Zhejiang University, Hangzhou 310027 (China)
We present the preparation and measurements of nanowires of single-crystal NbSe{sub 2}. These nanowires were prepared on ultrathin (≲10 nm) flakes of NbSe{sub 2} mechanically exfoliated from a bulk single crystal using a process combining electron beam lithography and reactive plasma etching. The electrical contacts to the nanowires were prepared using Ti/Au. Our technique, which overcomes several limitations of methods developed previously for fabricating superconducting nanowires, also allows for the preparation of complex superconducting nanostructures with a desired geometry. Current-voltage characteristics of individual superconducting single-crystal nanowires with widths down to 30 nm and cross-sectional areas as low as 270 nm{sup 2} were measured.
- OSTI ID:
- 22283256
- Journal Information:
- Applied Physics Letters, Vol. 104, Issue 5; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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