Embedded ultrasound sensor in a silicon-on-insulator photonic platform
Abstract
A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.
- Authors:
-
- Institute for Biological and Medical Imaging (IBMI), Technische Universität München and Helmholtz Zentrum München, Ingoldstädter Landstraße 1, 85764 Neuherberg (Germany)
- Publication Date:
- OSTI Identifier:
- 22275758
- Resource Type:
- Journal Article
- Journal Name:
- Applied Physics Letters
- Additional Journal Information:
- Journal Volume: 104; Journal Issue: 2; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
- Subject:
- 71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; GRATINGS; INTERFEROMETRY; PHASE SHIFT; POINT SOURCES; RESONANCE; SENSORS; SILICON; SOUND WAVES; ULTRASONOGRAPHY
Citation Formats
Rosenthal, Amir, Omar, Murad, Estrada, Héctor, Kellnberger, Stephan, Razansky, Daniel, and Ntziachristos, Vasilis. Embedded ultrasound sensor in a silicon-on-insulator photonic platform. United States: N. p., 2014.
Web. doi:10.1063/1.4860983.
Rosenthal, Amir, Omar, Murad, Estrada, Héctor, Kellnberger, Stephan, Razansky, Daniel, & Ntziachristos, Vasilis. Embedded ultrasound sensor in a silicon-on-insulator photonic platform. United States. https://doi.org/10.1063/1.4860983
Rosenthal, Amir, Omar, Murad, Estrada, Héctor, Kellnberger, Stephan, Razansky, Daniel, and Ntziachristos, Vasilis. 2014.
"Embedded ultrasound sensor in a silicon-on-insulator photonic platform". United States. https://doi.org/10.1063/1.4860983.
@article{osti_22275758,
title = {Embedded ultrasound sensor in a silicon-on-insulator photonic platform},
author = {Rosenthal, Amir and Omar, Murad and Estrada, Héctor and Kellnberger, Stephan and Razansky, Daniel and Ntziachristos, Vasilis},
abstractNote = {A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.},
doi = {10.1063/1.4860983},
url = {https://www.osti.gov/biblio/22275758},
journal = {Applied Physics Letters},
issn = {0003-6951},
number = 2,
volume = 104,
place = {United States},
year = {Mon Jan 13 00:00:00 EST 2014},
month = {Mon Jan 13 00:00:00 EST 2014}
}
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