Simultaneous determination of the elastic modulus and density/thickness of ultrathin films utilizing micro-/nanoresonators under applied axial force

Journal Article · Fri Mar 28 00:00:00 EDT 2014 · Journal of Applied Physics

DOI:https://doi.org/10.1063/1.4869415· OSTI ID:22271157

Zapomel, J. ^[1]; Chen, Y. -L. ^[2]

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1. Institute of Thermomechanics, Czech Academy of Sciences, Prague (Czech Republic)
2. Institute of Physics, Academia Sinica, Taipei, Taiwan (China)

Thin films are widely used in microelectronics, optics, filters, and various sensing devices. We propose a method to simultaneously determine the elastic modulus and density or thickness of ultrathin films deposited on various substrate materials. This methodology utilizes measurement of the resonant frequencies of the micro-/nanoresonator under intentionally applied axial tension and, consequently, the beam to string transition. Elastic modulus and density/thickness of thin film are obtained from the ratio between the resonant frequencies of the nanoresonator with and without applied axial force.

• OSTI ID: 22271157
• Journal Information: Journal of Applied Physics, Vol. 115, Issue 12; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
DENSITY
DEPOSITION
ELASTICITY
RESONATORS
SUBSTRATES
THICKNESS
THIN FILMS
YOUNG MODULUS