Fabrication of highly transparent diamond-like carbon anti-reflecting coating for Si solar cell application

Journal Article · Thu Apr 24 00:00:00 EDT 2014 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4872780· OSTI ID:22271043

Banerjee, Amit; Das, Debajyoti ^[1]

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1. Nano-Science Group, Energy Research Unit, Indian Association for the Cultivation of Science, Jadavpur, Kolkata-700032 (India)

ARC grade highly transparent unhydrogenated diamond-like carbon (DLC) films were produced, directly from a-C target, using RF magnetron sputtering deposition technique, for optoelectronic applications. Optical band gap, transmittance, reflectance, sp{sup 3} fraction, I{sub D}/I{sub G}, density, and refractive index of the films have been estimated with the help of optical tools like Uv-vis spectrophotometer, ellipsometer and micro-Raman. Optimum ARC-qualities have been identified in low-temperature grown DLC films at an Ar pressure of 4 mTorr in the reactor, accomplishing its key requirements for use in silicon solar cells.

• OSTI ID: 22271043
• Journal Information: AIP Conference Proceedings, Vol. 1591, Issue 1; Conference: 58. DAE solid state physics symposium 2013, Patiala, Punjab (India), 17-21 Dec 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
ABSORPTION SPECTROSCOPY
DENSITY
DEPOSITION
DIAMONDS
ELECTRONIC STRUCTURE
ELLIPSOMETRY
ENERGY GAP
OPACITY
RAMAN SPECTROSCOPY
REFRACTIVE INDEX
SILICON SOLAR CELLS
SPECTRAL REFLECTANCE
SPECTROPHOTOMETRY
SPUTTERING
THIN FILMS