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Title: Polarity dependence of the electrical characteristics of Ag reflectors for high-power GaN-based light emitting diodes

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.4874631· OSTI ID:22267725
;  [1];  [2];  [3]
  1. Department of Materials Science and Engineering, Korea University, Seoul 136-713 (Korea, Republic of)
  2. Department of LED Business, Chip Development Group, LG Innotek, Paju 413-901 (Korea, Republic of)
  3. School of Applied Chemical Engineering, Chonnam National University, Gwangju 500-757 (Korea, Republic of)

We report on the polarity dependence of the electrical properties of Ag reflectors for high-power GaN-based light-emitting diodes. The (0001) c-plane samples become ohmic after annealing in air. However, the (11–22) semi-polar samples are non-ohmic after annealing, although the 300 °C-annealed sample shows the lowest contact resistivity. The X-ray photoemission spectroscopy (XPS) results show that the Ga 2p core level for the c-plane samples experiences larger shift toward the valence band than that for the semi-polar samples. The XPS depth profile results show that unlike the c-plane samples, the semi-polar samples contain some amounts of oxygen at the Ag/GaN interface regions. The outdiffusion of Ga atoms is far more significant in the c-plane samples than in the semi-polar samples, whereas the outdiffusion of N atoms is relatively less significant in the c-plane samples. On the basis of the electrical and XPS results, the polarity dependence of the electrical properties is described and discussed.

OSTI ID:
22267725
Journal Information:
Applied Physics Letters, Vol. 104, Issue 17; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English

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