Temperature dependent structural, optical and hydrophobic properties of sputtered deposited HfO{sub 2} films

Journal Article · Tue Jan 28 00:00:00 EST 2014 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.4861972· OSTI ID:22264018

Dave, V. ^[1]; Dubey, P.; Chandra, R. ^[2]; Gupta, H. O. ^[1]

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1. Department of Electrical Engineering, IIT Roorkee (India)
2. Institute Instrumentation Centre, IIT Roorkee (India)

Hafnium oxide being high-k dielectric has been successfully utilized in electronic and optical applications. Being thermodynamically stable and having good mechanical strength, it can be used as a protective coating for outdoor HV insulators which are suffering from surface flashover problem due to contamination. In this paper, we are investigating the effect of substrate temperature on structural, optical and hydrophobic properties of hafnium oxide coating deposited over glass insulators by DC magnetron sputtering. X-ray diffraction is applied to determine the crystalline phase and crystallite size of the film. The morphology of the samples is examined using atomic force microscopy. The optical properties are studied using UV-vis-NIR spectrophotometer. The wettability of the film is investigated using contact angle meter. The thickness is measured using surface profilometer and verified through optical data. The relationship between substrate temperature with grain size, roughness, refractive index, and hydrophobicity is manifested. The maximum contact angle for HfO{sub 2} film was found to be 106° at 400°C.

• OSTI ID: 22264018
• Journal Information: AIP Conference Proceedings, Vol. 1576, Issue 1; Conference: OMTAT 2013: 2. international conference on optoelectronic materials and thin films for advanced technology, Kochi, Kerala (India), 3-5 Jan 2013; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

75 CONDENSED MATTER PHYSICS
SUPERCONDUCTIVITY AND SUPERFLUIDITY
36 MATERIALS SCIENCE
ATOMIC FORCE MICROSCOPY
DEPOSITS
DIELECTRIC MATERIALS
FILMS
GRAIN SIZE
HAFNIUM OXIDES
MAGNETRONS
SPUTTERING
SUBSTRATES
TEMPERATURE DEPENDENCE
X-RAY DIFFRACTION