High quality factor nanocrystalline diamond micromechanical resonators limited by thermoelastic damping
- Department of Electrical and Computer Engineering, University of California, Davis, California 95616 (United States)
- Department of Mechanical and Aerospace Engineering, University of California, Davis, California 95616 (United States)
- Department of Mechanical Engineering, University of California, Berkeley, California 94720 (United States)
- Department of Materials Science and Engineering, Materials Research Laboratory, University of Illinois, Urbana, Illinois 61801 (United States)
We demonstrate high quality factor thin-film nanocrystalline diamond micromechanical resonators with quality factors limited by thermoelastic damping. Cantilevers, single-anchored and double-anchored double-ended tuning forks, were fabricated from 2.5 μm thick in-situ boron doped nanocrystalline diamond films deposited using hot filament chemical vapor deposition. Thermal conductivity measured by time-domain thermoreflectance resulted in 24 ± 3 W m{sup −1} K{sup −1} for heat transport through the thickness of the diamond film. The resonant frequencies of the fabricated resonators were 46 kHz–8 MHz and showed a maximum measured Q ≈ 86 000 at f{sub n} = 46.849 kHz. The measured Q-factors are shown to be in good agreement with the limit imposed by thermoelastic dissipation calculated using the measured thermal conductivity. The mechanical properties extracted from resonant frequency measurements indicate a Young's elastic modulus of ≈788 GPa, close to that of microcrystalline diamond.
- OSTI ID:
- 22262592
- Journal Information:
- Applied Physics Letters, Vol. 104, Issue 15; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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