Nanowell-patterned TiO{sub 2} microcantilevers for calorimetric chemical sensing
- Department of Chemical and Materials Engineering, University of Alberta, Edmonton, Alberta T6G 2V4 (Canada)
- Department of Mechanical and Manufacturing Engineering, University of Calgary, Calgary, Alberta T2N 1N4 (Canada)
- Department of Chemical Engineering, Pohang University of Science and Technology, Pohang (Korea, Republic of)
A sensitive calorimetric sensor using a TiO{sub 2} microcantilever with nanowells patterned on one of its sides is described. This single material cantilever is sensitive to temperature change without relying on the metal deposition-based bimetallic effect. The thermomechanical sensitivity originates from the structure dependent variations in both the elastic modulus and thermal expansion coefficient due to the presence of ordered nanowells. These cantilever beams offer an alternate and efficient chemical sensing route for vapor phase analytes using photothermal spectroscopy. Selective and sensitive detection of organophosphorus compounds, as well as their photocatalytic decomposition under ultraviolet light exposure are demonstrated.
- OSTI ID:
- 22261590
- Journal Information:
- Applied Physics Letters, Vol. 104, Issue 14; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
Similar Records
Geometrical Considerations for Piezoresistive Microcantilever Response to Surface Stress during Chemical Sensing
Optical and infrared detection using microcantilevers