Investigation of the optical properties of MoS{sub 2} thin films using spectroscopic ellipsometry

Journal Article · Mon Mar 10 00:00:00 EDT 2014 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4868108· OSTI ID:22257743

Yim, Chanyoung; O'Brien, Maria; Winters, Sinéad ^[1]; McEvoy, Niall ^[2]; Mirza, Inam; Lunney, James G. ^[2]

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1. School of Chemistry, Trinity College Dublin, Dublin 2 (Ireland)
2. Centre for Research on Adaptive Nanostructures and Nanodevices (CRANN), Trinity College Dublin, Dublin 2 (Ireland)

Spectroscopic ellipsometry (SE) characterization of layered transition metal dichalcogenide (TMD) thin films grown by vapor phase sulfurization is reported. By developing an optical dispersion model, the extinction coefficient and refractive index, as well as the thickness of molybdenum disulfide (MoS{sub 2}) films, were extracted. In addition, the optical band gap was obtained from SE and showed a clear dependence on the MoS{sub 2} film thickness, with thinner films having a larger band gap energy. These results are consistent with theory and observations made on MoS{sub 2} flakes prepared by exfoliation, showing the viability of vapor phase derived TMDs for optical applications.

• OSTI ID: 22257743
• Journal Information: Applied Physics Letters, Vol. 104, Issue 10; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ELLIPSOMETRY
MOLYBDENUM SULFIDES
OPTICAL DISPERSION
REFRACTIVE INDEX
THIN FILMS
TRANSITION ELEMENTS