Electron energy distribution function by using probe method in electron cyclotron resonance multicharged ion source

Journal Article · Sat Feb 15 00:00:00 EST 2014 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4829738· OSTI ID:22254065

Kumakura, Sho; Kurisu, Yosuke; Kimura, Daiju; Yano, Keisuke; Imai, Youta; Sato, Fuminobu; Kato, Yushi; Iida, Toshiyuki ^[1]

---

1. Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, Osaka (Japan)

We are constructing a tandem type electron cyclotron resonance (ECR) ion source (ECRIS). High-energy electrons in ECRIS plasma affect electron energy distribution and generate multicharged ion. In this study, we measure electron energy distribution function (EEDF) of low energy region (≦100 eV) in ECRIS plasma at extremely low pressures (10{sup −3}–10{sup −5} Pa) by using cylindrical Langmuir probe. From the result, it is found that the EEDF correlates with the electron density and the temperature from the conventional probe analysis. In addition, we confirm that the tail of EEDF spreads to high energy region as the pressure rises and that there are electrons with high energy in ECR multicharged ion source plasma. The effective temperature estimated from the experimentally obtained EEDF is larger than the electron temperature obtained from the conventional method.

• OSTI ID: 22254065
• Journal Information: Review of Scientific Instruments, Vol. 85, Issue 2; Conference: ICIS 2011: 14. international conference on ion sources, Giardini-Naxos, Sicily (Italy), 12-16 Sep 2011; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

74 ATOMIC AND MOLECULAR PHYSICS
43 PARTICLE ACCELERATORS
ECR ION SOURCES
ELECTRON CYCLOTRON-RESONANCE
ELECTRON DENSITY
ELECTRON TEMPERATURE
ENERGY SPECTRA
EV RANGE 10-100
LANGMUIR PROBE
MULTICHARGED IONS
PLASMA