Improved strain precision with high spatial resolution using nanobeam precession electron diffraction

Journal Article · Mon Dec 09 00:00:00 EST 2013 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.4829154· OSTI ID:22253774

Rouviere, Jean-Luc; Martin, Yannick ^[1]; Béché, Armand ^[1]; Denneulin, Thibaud; Cooper, David ^[2]

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1. CEA-INAC/UJF-Grenoble UMR-E, SP2M, LEMMA, Minatec Grenoble F-38054 (France)
2. CEA, LETI, Minatec, F-38054 Grenoble (France)

NanoBeam Electron Diffraction is a simple and efficient technique to measure strain in nanostructures. Here, we show that improved results can be obtained by precessing the electron beam while maintaining a few nanometer probe size, i.e., by doing Nanobeam Precession Electron Diffraction (N-PED). The precession of the beam makes the diffraction spots more uniform and numerous, making N-PED more robust and precise. In N-PED, smaller probe size and better precision are achieved by having diffraction disks instead of diffraction dots. Precision in the strain measurement better than 2 × 10{sup −4} is obtained with a probe size approaching 1 nm in diameter.

• OSTI ID: 22253774
• Journal Information: Applied Physics Letters, Vol. 103, Issue 24; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

77 NANOSCIENCE AND NANOTECHNOLOGY
ACCURACY
ELECTRON BEAMS
ELECTRON DIFFRACTION
NANOSTRUCTURES
PRECESSION
PROBES
SPATIAL RESOLUTION
STRAINS