Control of ions energy distribution in dual-frequency magnetron sputtering discharges

Ye, Chao; He, Haijie; Huang, Fupei; Liu, Yi; Wang, Xiangying

doi:10.1063/1.4873401

Title: Control of ions energy distribution in dual-frequency magnetron sputtering discharges

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Abstract

The ion energy distributions (IEDs) in the dual-frequency magnetron sputtering discharges were investigated by retarding field energy analyzer. Increasing power ratio of 2 MHz to 13.56 (27.12 or 60) MHz led to the evolution of IEDs from a uni-modal distribution towards a uni-modal distribution with high-energy peak shoulder and a bi-modal distribution. While increasing power ratio of 13.56 MHz to 27.12 MHz and 27.12 MHz to 60 MHz, led to the increase of peak energy. The evolution of IEDs shape and the increase of peak energy are due to the change of ions responding to the average field of high-frequency period towards the instantaneous sheath potential of low-frequency period.

Authors:

Ye, Chao; He, Haijie; Huang, Fupei; Liu, Yi ^[1]; Wang, Xiangying ^[2]

School of Physics Science and Technology, Jiangsu Key Laboratory of Thin Films, Soochow University, Suzhou 215006 (China)
Medical College of Soochow University, Suzhou 215123 (China)

Publication Date:: Tue Apr 15 00:00:00 EDT 2014

OSTI Identifier:: 22253072

Resource Type:: Journal Article

Journal Name:: Physics of Plasmas

Additional Journal Information:: Journal Volume: 21; Journal Issue: 4; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070-664X

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; DISTRIBUTION; ENERGY SPECTRA; MAGNETRONS; MHZ RANGE 01-100; PEAKS

Citation Formats


                    Ye, Chao, He, Haijie, Huang, Fupei, Liu, Yi, and Wang, Xiangying. Control of ions energy distribution in dual-frequency magnetron sputtering discharges.  United States: N. p., 2014. 
        Web.  doi:10.1063/1.4873401.

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                    Ye, Chao, He, Haijie, Huang, Fupei, Liu, Yi, & Wang, Xiangying. Control of ions energy distribution in dual-frequency magnetron sputtering discharges.  United States.  https://doi.org/10.1063/1.4873401

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                    Ye, Chao, He, Haijie, Huang, Fupei, Liu, Yi, and Wang, Xiangying. 2014.  
        "Control of ions energy distribution in dual-frequency magnetron sputtering discharges".  United States.  https://doi.org/10.1063/1.4873401.

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@article{osti_22253072,

  title        = {Control of ions energy distribution in dual-frequency magnetron sputtering discharges},

  author       = {Ye, Chao and He, Haijie and Huang, Fupei and Liu, Yi and Wang, Xiangying},

  abstractNote = {The ion energy distributions (IEDs) in the dual-frequency magnetron sputtering discharges were investigated by retarding field energy analyzer. Increasing power ratio of 2 MHz to 13.56 (27.12 or 60) MHz led to the evolution of IEDs from a uni-modal distribution towards a uni-modal distribution with high-energy peak shoulder and a bi-modal distribution. While increasing power ratio of 13.56 MHz to 27.12 MHz and 27.12 MHz to 60 MHz, led to the increase of peak energy. The evolution of IEDs shape and the increase of peak energy are due to the change of ions responding to the average field of high-frequency period towards the instantaneous sheath potential of low-frequency period.},

  doi          = {10.1063/1.4873401},

  url          = {https://www.osti.gov/biblio/22253072},
  journal      = {Physics of Plasmas},

  issn         = {1070-664X},

  number       = 4,

  volume       = 21,

  place        = {United States},

  year         = {Tue Apr 15 00:00:00 EDT 2014},

  month        = {Tue Apr 15 00:00:00 EDT 2014}

}

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