Numerical simulation of the sustaining discharge in radio frequency hollow cathode discharge in argon
- School of Physics, Beijing Institute of Technology, Beijing 100081 (China)
- Laboratory of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 10081 (China)
In this paper, a two-dimensional fluid model was developed to study the radio frequency (RF) hollow cathode discharge (HCD) in argon at 1 Torr. The evolutions of the particle density distribution and the ionization rate distribution in RF HCD at 13.56 MHz indicate that the discharge mainly occurs inside the hollow cathode. The spatio-temporal distributions of the ionization rate and the power deposition within the hollow cathode imply that sheath oscillation heating is the primary mechanism to sustain the RF HCD, whereas secondary electron emission plays a negligible role. However, as driving frequency decreases, secondary electron heating becomes a dominant mechanism to sustain the discharge in RF hollow cathode.
- OSTI ID:
- 22251890
- Journal Information:
- Physics of Plasmas, Vol. 21, Issue 3; Other Information: (c) 2014 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
- Country of Publication:
- United States
- Language:
- English
Similar Records
Diagnostics of RG argon discharge
Micro-hollow cathode dischargers