Note: Design and development of an integrated three-dimensional scanner for atomic force microscopy
Journal Article
·
· Review of Scientific Instruments
- Department of Instrumentation and Applied Physics, Indian Institute of Science, Bangalore 560012 (India)
A compact scanning head for the Atomic Force Microscope (AFM) greatly enhances the portability of AFM and facilitates easy integration with other tools. This paper reports the design and development of a three-dimensional (3D) scanner integrated into an AFM micro-probe. The scanner is realized by means of a novel design for the AFM probe along with a magnetic actuation system. The integrated scanner, the actuation system, and their associated mechanical mounts are fabricated and evaluated. The experimentally calibrated actuation ranges are shown to be over 1 μm along all the three axes.
- OSTI ID:
- 22251509
- Journal Information:
- Review of Scientific Instruments, Vol. 84, Issue 11; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
- Country of Publication:
- United States
- Language:
- English
Similar Records
Design and performance of a combined secondary ion mass spectrometry-scanning probe microscopy instrument for high sensitivity and high-resolution elemental three-dimensional analysis
Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy
Journal Article
·
Fri Jun 15 00:00:00 EDT 2012
· Review of Scientific Instruments
·
OSTI ID:22251509
+7 more
Note: A silicon-on-insulator microelectromechanical systems probe scanner for on-chip atomic force microscopy
Journal Article
·
Wed Apr 15 00:00:00 EDT 2015
· Review of Scientific Instruments
·
OSTI ID:22251509
Design and Characterization of a MEMS Probe Scanner for On-chip Atomic Force Microscopy
Conference
·
Mon Jul 01 00:00:00 EDT 2019
·
OSTI ID:22251509