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Title: Effect of collision parameters in electronegative plasma sheath with two species of positive ions

Journal Article · · Physics of Plasmas
DOI:https://doi.org/10.1063/1.4820803· OSTI ID:22220644
;  [1];  [2]
  1. Center of Plasma Physics, Institute for plasma Research, Sonapur, Guwahati 782402 (India)
  2. Department of Physics, Arya Vidyapeeth College, Guwahati 781016 (India)

The effect of ion neutral collision is shown for two species of positive ions in electronegative plasma. The ion neutral collision is modeled using power law of collision cross section. It is a usual case for processing plasma to have two species of positive ions and hence we attempt to study the dynamics of the two species of ions inside the collisional sheath of electronegative plasma.

OSTI ID:
22220644
Journal Information:
Physics of Plasmas, Vol. 20, Issue 9; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 1070-664X
Country of Publication:
United States
Language:
English

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