Wall current probe: A non-invasive in situ plasma diagnostic for space and time resolved current density distribution measurement

Journal Article · Thu Aug 15 00:00:00 EDT 2013 · Review of Scientific Instruments

DOI:https://doi.org/10.1063/1.4815823· OSTI ID:22220468

Baude, R.; Gaboriau, F.; Hagelaar, G. J. M. ^[1]

---

1. Université de Toulouse, UPS, INPT, LAPLACE (Laboratoire Plasma et Conversion d’énergie), 118 route de Narbonne, F-31062 Toulouse Cedex 9, France and CNRS, LAPLACE, F-31062, Toulouse (France)

In the context of low temperature plasma research, we propose a wall current probe to determine the local charged particle fluxes flowing to the chamber walls. This non-intrusive planar probe consists of an array of electrode elements which can be individually biased and for which the current can be measured separately. We detail the probe properties and present the ability of the diagnostic to be used as a space and time resolved measurement of the ion and electron current density at the chamber walls. This diagnostic will be relevant to study the electron transport in magnetized low-pressure plasmas.

• OSTI ID: 22220468
• Journal Information: Review of Scientific Instruments, Vol. 84, Issue 8; Other Information: (c) 2013 AIP Publishing LLC; Country of input: International Atomic Energy Agency (IAEA); ISSN 0034-6748
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
70 PLASMA PHYSICS AND FUSION TECHNOLOGY
CHARGED PARTICLES
CURRENT DENSITY
ELECTRON DENSITY
ELECTRONS
PLASMA DENSITY
PROBES
TIME RESOLUTION
WALL EFFECTS